IEC 60204-33:2009 

Safety of machinery - Electrical equipment of machines - Part 33: Requirements for semiconductor fabrication equipment

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Abstract

IEC 60204-33:2009 applies to electrical and electronic equipment associated with semiconductor fabrication equipment for the manufacture, measurement, assembly, and test of semiconductors. It is applicable to the electrical equipment or parts of the electrical equipment that operate with nominal supply voltages not exceeding 1 000 V for alternating current (a.c.) and not exceeding 1 500 V for direct current (d.c.), and with nominal supply frequencies not exceeding 200 Hz. For higher voltages or frequencies, special requirements IEC 60204 applies to electrical and electronic equipment associated with semiconductor fabrication equipment for the manufacture, measurement, assembly, and test of semiconductors.

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Additional information

Publication typeInternational Standard
Publication date2009-12-10
Edition1.0
Available language(s)English/French
TC/SCTC 44 - Safety of machinery - Electrotechnical aspectsrss
ICS13.110 - Safety of machinery
25.040.30 - Industrial robots. Manipulators
29.020 - Electrical engineering in general
Stability date  2018
Pages247
File size2446 KB

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